Other Wafer Fabrication Equipment
OSIRIS INTERNATIONAL MANUAL WAFER DEBONDING TOOL
Manual Wafer Debonding Tool
Other Wafer Fabrication Equipment
Manual Wafer Debonding Tool
Other Wafer Fabrication Equipment
200° C 16 " x 16" Hot Plate with Vacuum Hold Down
Other Wafer Fabrication Equipment
Wafer Bonder Controller
Other Wafer Fabrication Equipment
2005 SmartView® Semi-Automated Wafer-to-Wafer Bond Aligner The EV Group (EVG) Smartview® Bond aligner and EV Group (EVG) 540 Wafer Bonder are used in the production of MEMs and in the emerging fields of 3D IC Packaging and Through-Silicon Via (TSV) interconnects.
A 3D integrated circuit (3D IC) is a single integrated circuit built by stacking silicon wafers and/or dies and interconnecting them vertically. This is achieved by persisly aligning devices on two silicon wafers and subsequently bonding them together. The result is they behave as a single device. By using TSV technology, 3D ICs can pack a great deal of functionality into a small “footprint.” This technology is not olny used in the production of MEMS, but also in the fabrication of CMOS image sensors, and memory devices.
Other Wafer Fabrication Equipment
Wafer Bonder Sharon Vacuum